High reflectance ta-C coatings in the extreme ultraviolet
نویسندگان
چکیده
منابع مشابه
High reflectance ta-C coatings in the extreme ultraviolet.
The extreme ultraviolet (EUV) reflectance of amorphous tetrahedrally coordinated carbon films (ta-C) prepared by filtered cathodic vacuum arc was measured in the 30-188-nm range at near normal incidence. The measured reflectance of films grown with average ion energies in the ~70-140-eV range was significantly larger than the reflectance of a C film grown with average ion energy of ~20 eV and o...
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Juan I. Larruquert José A. Méndez José A. Aznárez Instituto de Fı́sica Aplicada-CSIC C/Serrano 144 28006-Madrid, Spain E-mail: [email protected] Abstract. Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (lp;83 nm). Above lp the bilayers have a high reflectance comparable to that of...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2013
ISSN: 1094-4087
DOI: 10.1364/oe.21.027537